Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1997-06-09
1998-07-07
Chapman, John E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
7351438, G01P 1513
Patent
active
057772266
ABSTRACT:
A sensor structure (10) has a central mass (16) mounted within a support structure comprising an outer frame (18) with upper and lower covers (12, 14). Eight L-shaped or elbow-shaped ribbon springs are fit about the corners (28) of the mass (16) to allow mass (16) for movement from a reference position with respect to the support structure. One leg of each spring is connected to the middle of an associated side (26A) of the mass (16) while the other leg is connected to the outer frame (18). According to an alternative embodiment, each of the springs (72) is characterized by a relatively larger width at spring-mass connection point (74) and at spring-support connection point (73) and a relatively smaller width at an elbow-bend region between connection points. Narrow gaps G, G' and G" between spring and support, spring and mass and spring and adjacent springs provide lateral stops such that the spring laterally contacts the support or the mass or in adjacent spring before it breaks in response to extremely large lateral forces in the structure. The sensor structure is designed for use as a sensing mechanism in an electrostatic accelerometer arrangement.
REFERENCES:
patent: 4021766 (1977-05-01), Aine
patent: 4071838 (1978-01-01), Block
patent: 4144516 (1979-03-01), Aine
patent: 4553436 (1985-11-01), Hansson
patent: 4597003 (1986-06-01), Aine et al.
patent: 4641539 (1987-02-01), Vilimek
patent: 4679434 (1987-07-01), Stewart
patent: 4901570 (1990-02-01), Chang et al.
patent: 4922756 (1990-05-01), Henrion
patent: 4930042 (1990-05-01), Wiegand
patent: 5000817 (1991-03-01), Aine
patent: 5121180 (1992-06-01), Beringhause et al.
patent: 5134881 (1992-08-01), Henrion et al.
patent: 5209117 (1993-05-01), Bennett
patent: 5261277 (1993-11-01), Thomas
patent: 5412986 (1995-05-01), Beringhause et al.
patent: 5484073 (1996-01-01), Erickson
patent: 5487305 (1996-01-01), Ristic et al.
patent: 5576483 (1996-11-01), Bonin
patent: 5652384 (1997-07-01), Henrion et al.
Proceedings of The IEEE, vol. 70, No. 5, May, 1982, Petersen, Kurt E., Silicon as a Mechanical Material.
Proceedings of the IEEE, vol. ED-25, No. 10, Oct. 1978; Bassous, Ernest; Fabrication of Novel Three-Dimensional Microsturctures by the Anisotopic Etching of (100) and (110) Silicon.
Scientific American, Apr. 1983; Angell, James B., Terry, Stephen C., and Barth, Phillip W.; Silicon Micromechanical Devices.
IEEE Publication 0018-9383/79/1200-1911, 1979; Roylance, Lynn M. and Angell, James B.; A Batch-Fabricated Silicon Accelerometer.
IEEE Publication CH278-9/90/000-0153, 1993; Henrion, Wo, DiSanza, Len; Ip, Matthew; Terry, Stephen; & Jerman, Hall; Micro-Machined Accelerometer.
Chapman John E.
I/O Sensors, Inc.
LandOfFree
Sensor structure with L-shaped spring legs does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Sensor structure with L-shaped spring legs, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Sensor structure with L-shaped spring legs will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1208149