Sensor structure and method of fabricating the same

Details Sensor structure and method of fabricating the same Sensor structure and method of fabricating the same

2004-08-09

2010-11-02

Warden, Jill (Department: 1797)

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Means for analyzing liquid or solid sample

C422S088000, C422S098000, C073S023200, C073S025010, C073S025050, C073S031010, C073S031020, C073S031050, C073S031030

Reexamination Certificate

active

07824618

ABSTRACT:
Provided is a sensor structure comprising a heater and a temperature sensor at the center of a membrane having a well structure, allowing a temperature to be rapidly controlled with low power, and the object is analyzed using a conductivity change measured at two or more substrate temperatures with a pair of detecting electrode and a detecting layer implemented on the heater, wherein the sensing layer can include a conductive particle and a non-conductive organic composite.

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Zee, Frank et al., Micromachined polymer-based chemical gas sensor array, Sensors and Actuators B: Chemical, vol. 72, Issue 2, Jan. 25, 2001, pp. 120-128.
Lonergan, Mark C. et al., Array-Based Vapor Sensing Using Chemically Sensitive, Carbon Black-Polymer Resistors, Chemistry of Materials., vol. 8, Issue 9, Sep. 1996, pp. 2298-2312.
Yang et al.; “Substrate Temperature Dependence of Carbon Black-Organic Polymer Composite Vapor Sensors for Vapor Characterization”; The Electrochemical Society, Inc.; 2003; 2 pages.
Haug et al.; “Chemical sensors based upon polysiloxanes: comparison between optical, quartz microbalance, calorimetric, and capacitance sensors”; Sensors & Actuators; 1993; pp. 383-391.

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