Sensor module for a probe head of a tactile coordinated...

Details Sensor module for a probe head of a tactile coordinated... Sensor module for a probe head of a tactile coordinated...

2007-11-20

2007-11-20

Bennett, G. Bradley (Department: 2859)

Geometrical instruments

Gauge

Movable contact probe, per se

Reexamination Certificate

active

11656364

ABSTRACT:
A sensor module for a probe head of a tactile coordinate measuring machine has a frame forming a stationary module base, thereby defining a first measurement plane. A moving part is connected to the frame via webs. Each web has a thick-material web portion arranged between two thin-material web portions, if seen in a cross section perpendicularly to the first measurement plane. The thick-material web portion has a material thickness greater than the corresponding material thickness of the thin-material web portions.

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Thomas Kleine-Besten et al.; Miniaturized 3D Touch Sensor For Metrology On Microstructures; Dec. 1999; 16 pages.

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