Sensor matrix

Details Sensor matrix Sensor matrix

1991-01-23

1992-07-21

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

357 30, 357 32, G01T 129, G01T 116, H01L 2714

Patent

active

051325411

ABSTRACT:
A sensor matrix includes light-sensitive and/or X-ray sensitive thin-film sensors (1) comprising two electrodes (2, 6) and a semiconductor layer (5) therebetween. In each sensor (1) there is a separate electrode which serves as the first electrode (2), the semiconductor layer (5) being constructed as a continuous layer which is common to all sensors (1), and which covers all first electrodes (1), the second electrodes (6) being formed, at least for groups of sensors (1), as a continuous layer (6) which covers the semiconductor layer (5) at the area of all first electrodes (2) of the sensors (1) of the relevant group and acts as a second electrode for all sensors of the relevant group.

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