Sensor head for use in atomic force microscopy and method for it

Details Sensor head for use in atomic force microscopy and method for it Sensor head for use in atomic force microscopy and method for it

1994-03-30

1995-11-14

Chilcot, Richard

Measuring and testing

Surface and cutting edge testing

73105, G01B 900

Patent

active

054656117

ABSTRACT:
A sensor head (1) is described, which has a spacer (5b) between a carrier element (2) and the spring arm (7), which, perhaps carries a sensor tip (9) at the free end; the spacer defines the distance d between the spring arm (7) and the carrier element (2). In a preferred embodiment, the spacer (5b) comprises a sacrificial layer (5a), which is etched out, except for the spacer (5b), after the formation of a corresponding layer system between the spring arm (7) and the carrier element (2). The carrier element (2) and the spring arm (7) are each provided with a reflecting layer (4 and 6). In accordance with another specific embodiment, plasmonactive layers can also be provided.

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