Sensor having a thin film element

Details Sensor having a thin film element Sensor having a thin film element

1998-03-09

2000-08-15

Patel, Harshad

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

061018724

ABSTRACT:
A sensor has a thin film element, the thin film element having a temperature-dependent electrical resistance. The thin film element includes a platinum layer, which is doped with zircon or zircon oxide. The thin film element can be arranged on a membrane to create a mass airflow sensor.

REFERENCES:
patent: 4428817 (1984-01-01), Isenberg
patent: 4455214 (1984-06-01), Isenberg
patent: 4648271 (1987-03-01), Woolf
patent: 4744246 (1988-05-01), Busta
patent: 4765880 (1988-08-01), Hayakawa et al.
patent: 5003822 (1991-04-01), Joshi
patent: 5033299 (1991-07-01), Tanaka et al.
patent: 5064693 (1991-11-01), Hayakawa et al.
patent: 5108193 (1992-04-01), Furubayashi

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