Sensor having a magnetic field-sensitive element with accurately

Details Sensor having a magnetic field-sensitive element with accurately Sensor having a magnetic field-sensitive element with accurately

1985-01-31

1986-02-04

Albritton, C. L.

Electrical resistors

Resistance value responsive to a condition

Magnetic field or compass

338 32H, 324251, 324252, 360112, 360113, H01L 4308, H01L 4312, G11B 539

Patent

active

045689067

ABSTRACT:
A sensor suitable for measuring magnetic field gradients spanning very small regions has a magnetic field-sensitive element (37, 42) with a very accurately defined height and thickness (even into the nanometer range) which is perpendicular to the surface of a substrate (30, 41) so that the substrate surface may be used in aligning the element (37, 42).

REFERENCES:
patent: 3881190 (1975-04-01), Brock et al.
patent: 3887944 (1975-06-01), Bajorek et al.
patent: 3987485 (1976-10-01), Sugaya et al.
patent: 4151574 (1979-04-01), Gerkema et al.
patent: 4281357 (1981-07-01), Lee
patent: 4313782 (1982-02-01), Sokoloski
Okazaki, et al., "Edge-Defined Patterning of Hyperfine Refractory Metal Silicides MOS Structure," IEEE Transactions on Electron Devices, vol. ED-28, No. 11, pp. 1364-1367, Nov. 1981.

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