Sensor for use in a lithographic apparatus

Details Sensor for use in a lithographic apparatus Sensor for use in a lithographic apparatus

2007-09-07

2008-11-18

Pyo, Kevin (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

C355S053000

Reexamination Certificate

active

07453078

ABSTRACT:
A sensor for use at substrate level in a high numerical aperature lithographic apparatus, the sensor having a transparent plate that covers a sensing element and includes elements that improve coupling of radiation into the sensing element. The elements include Fresnel lenses, holographic optical elements, inverted Winston Cones, spherical lenses and surface roughening.

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