Sensor for use in a lithographic apparatus

Details Sensor for use in a lithographic apparatus Sensor for use in a lithographic apparatus

2007-10-16

2007-10-16

Epps, Georgia (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S216000, C430S030000, C355S053000

Reexamination Certificate

active

11067491

ABSTRACT:
A sensor for use at substrate level in a high numerical aperature lithographic apparatus, the sensor having a transparent plate that covers a sensing element and includes elements that improve coupling of radiation into the sensing element. The elements include Fresnel lenses, holographic optical elements, inverted Winston Cones, spherical lenses and surface roughening.

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Roland Winston, “Light Collection within the Framework of Geometrical Optics”, Journal of the Optical Society of America, vol. 60, No. 1, pp. 245-247 (Feb. 1970).
European Search Report issued in EP Appl. No. 06 25 0875 dated Aug. 29, 2006.

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