Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
Reexamination Certificate
2005-04-26
2005-04-26
Meeks, Timothy (Department: 1762)
Coating processes
Measuring, testing, or indicating
Thickness or uniformity of thickness determined
C427S010000, C427S248100
Reexamination Certificate
active
06884458
ABSTRACT:
A material deposition sensor includes a heater and a temperature sensor separated from one another. In operation, the sensor is disposed within a deposition chamber, and material is deposited onto the sensor. When a particular material thickness is deposited, a direct thermally conductive path is created between the heater and temperature sensor, and heat from the heater conducts directly to the temperature sensor. By predetermining a deposition thickness necessary to create the direct thermally conductive path, the deposition thickness can be controlled and/or predicted.
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Meeks Timothy
The Board of Trustees of The University of Illinois
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