Sensor for determining a ratio of materials in a mixture and met

Details Sensor for determining a ratio of materials in a mixture and met Sensor for determining a ratio of materials in a mixture and met

1994-04-04

1996-03-19

Monin, Jr., Donald L.

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Junction field effect transistor

257275, 324637, G01R 2704, H01L 2980

Patent

active

055005438

ABSTRACT:
A sensor (10, 40) for measuring the ratio of fluids or other materials in mixture (12) utilizes a coplanar resonator. The resonator has an outer conductor or conductor plane (17, 41) that is on a semiconductor substrate (11). The conductor plane (17, 41) has an opening (18, 48) that exposes a portion of the surface of the substrate. An inner conductor or sensing element (19, 42) is formed on the exposed surface within the opening (18, 48) so that the conductor plane (17, 41) and the sensing element (19, 42) are coplanar. The sensing element (19, 42) is coupled to an input (22) of a transistor (21) to form an oscillator. The oscillator frequency varies as the ratio of materials in the mixture (12) varies.

REFERENCES:
patent: 4453125 (1984-06-01), Kimura et al.

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