Sensor for detecting ultra-violet rays

Details Sensor for detecting ultra-violet rays Sensor for detecting ultra-violet rays

1994-08-03

1996-03-19

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

250374, H01J 4700

Patent

active

055005314

ABSTRACT:
This invention relates to a sensor for detecting ultra-violet rays suitable for mass-production. The sensor for detecting ultra-violet rays includes one that is formed by junction of an upper layer with a lower layer so as to face each other across an air cavity, which lower layer includes a silicon substrate having a cavity, an insulation layer formed on all over the silicon substrate, a photoelectric pole part formed on the insulation layer and a protection layer formed on the photoelectric part, and which upper layer includes a glass substrate having a transmissive characteristic to ultra-violet rays, and an anode part formed on the glass substrate.

REFERENCES:
patent: 5021668 (1991-06-01), Talmore et al.
patent: 5349194 (1994-09-01), Wuest et al.

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