Incremental printing of symbolic information – Ink jet – Ejector mechanism
Reexamination Certificate
2002-03-01
2004-07-20
Vo, Anh T. N. (Department: 2861)
Incremental printing of symbolic information
Ink jet
Ejector mechanism
Reexamination Certificate
active
06764168
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field Of The Invention
The present invention relates generally to sensors, and more particularly but not exclusively to sensors employed in integrated circuit fabrication.
2. Description Of The Background Art
Fabrication of an integrated circuit (IC) typically requires deposition of one or more layers of material onto a wafer. The deposited material, which is also referred to as “thin film” or simply “film”, is preferably deposited such that it has uniform thickness across the wafer or localized regions of the wafer. As is well know, the more uniform the film thickness, the better. Thus, a technique for facilitating dispensing of uniform amounts of material on a wafer is generally desirable.
SUMMARY
The present invention relates to methods and apparatus for detecting droplet characteristics. Embodiments of the present invention may be used in various applications including, without limitation, in dispensing uniform amounts of materials on a wafer and other workpieces.
In one embodiment, a sensor includes two plates that form a capacitor. A droplet passing between the plates changes the capacitance of the sensor, thereby triggering an amplifier coupled to the sensor to generate an output signal. The output signal is indicative of droplet characteristics and may be used to calibrate a mechanism that dispensed the droplet.
These and other features and advantages of the present invention will be readily apparent to persons of ordinary skill in the art upon reading the entirety of this disclosure, which includes the accompanying drawings and claims.
REFERENCES:
patent: 3852768 (1974-12-01), Carmichael et al.
patent: 4922268 (1990-05-01), Osborne
patent: 5705935 (1998-01-01), Nishimura
patent: 6436843 (2002-08-01), Meinhold et al.
patent: 6617079 (2003-09-01), Pillion et al.
patent: 2003/0011663 (2003-01-01), Sarmast
IJT print head, Ink Jet Technology Inc., webpage [online] [retrieved on Feb. 8, 2002]. Retrieved from the Internet: URL:http://www.inkjet-tech.com.html.
Charge Sensitive Preamplifier A250, State-Of-the-Art, webpage [online] [retrieved on Feb. 6, 2002]. Retrieved from the internet: URL:http://www.amptek.com/a250.html.
Chetcuti Fred J.
Chinchwadkar Sachin M.
Drewery John S.
Meinhold Henner W.
Rea Mark L.
Novellus Systems Inc.
Okamoto & Benedicto LLP
Vo Anh T. N.
LandOfFree
Sensor for detecting droplet characteristics does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Sensor for detecting droplet characteristics, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Sensor for detecting droplet characteristics will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3230191