Sensor for articles such as wafers on end effector

Details Sensor for articles such as wafers on end effector Sensor for articles such as wafers on end effector

1993-05-07

1996-07-23

Regan, Maura K.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

331 65, 324688, 324663, G01R 2726, G01N 2700

Patent

active

055393233

ABSTRACT:
The presence of an article at a specified location is detected by measuring a change in capacitance which is caused by the placement of the article at the specified location. The device used for this measurement includes an oscillator the frequency whereof is rendered highly sensitive to the capacitance being measured by structure which includes a triaxial cable and by electrical circuitry which includes a voltage follower circuit.

REFERENCES:
patent: 3626287 (1971-12-01), Di Niro
patent: 3870948 (1975-03-01), Holt
patent: 3883826 (1975-05-01), Kirby
patent: 4067225 (1978-01-01), Dorman et al.
patent: 4176555 (1979-12-01), Dorman
patent: 4347741 (1982-09-01), Gerger
patent: 4666366 (1987-05-01), Davis
patent: 4743837 (1988-05-01), Herzog
patent: 4763063 (1988-08-01), Shkedi
patent: 4794320 (1988-12-01), Chang
patent: 4909701 (1990-03-01), Hardegen et al.
patent: 4918376 (1990-04-01), Poduje et al.
patent: 5021740 (1991-06-01), Sarr et al.
patent: 5045797 (1991-09-01), Kramer et al.
patent: 5148126 (1992-08-01), Spencer
patent: 5363051 (1994-11-01), Jenstrom et al.

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