Sensor-equipped joint member

Fluid handling – Systems – With flow control means for branched passages

Reexamination Certificate

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Reexamination Certificate

active

07896030

ABSTRACT:
The present invention provides a joint member which suppresses the increase of the number of members and enables the provision of a further compactified integrated fluid control apparatus.A sensor-equipped joint member10includes a channel block41including a V-shaped channel41aformed therein for communicating adjacent fluid control devices16and20to each other at their lower-end openings, and a pressure sensor42provided on a side surface of the channel block41. The channel block41is provided with a branched channel41bwhich is branched from the V-shaped channel41aand is communicated to the pressure sensor42.

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patent: 2003-139271 (2003-05-01), None
patent: 2003-240180 (2003-08-01), None

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