Metal working – Method of mechanical manufacture – Electrical device making
Patent
1989-11-27
1991-02-12
Myracle, Jerry W.
Metal working
Method of mechanical manufacture
Electrical device making
264 61, G01R 300
Patent
active
049912836
ABSTRACT:
A structure formed of a plurality of sheets which are laminated and fused together includes at least one sintered ceramic sheet formed from thermally fusible tape. A sensor element, such as a cantilever, circular diaphragm, rectangular diaphragm supported at least two sides, or microbridge, is formed as a part of the ceramic sheet. A hole may be formed through one of the sheets adjacent to the ceramic sheet to expose the sensor element to an ambient environment which is to be sensed. Electrical signals corresponding to a physical change in the sensor element such as stress or displacement are generated by piezoresistor, variable capacitor, photodetector, or the like attached to or formed on the sensor element, which is interconnected with a metallization pattern formed on at least one of the sheets. The thickness of the sheets is highly uniform, thereby producing sensor elements with precisely reproducible thicknesses and mechanical properties.
REFERENCES:
patent: 4665610 (1987-05-01), Barth
patent: 4894635 (1990-01-01), Yajima et al.
Ettre, K. et al., Pressure-Fusible Tapes . . . Structures, Ceramic Bulletin, vol. 51, No. 5, 1972, pp. 482-485.
Johnson Gary W.
Vitriol William A.
Denson-Low W. K.
Gudmestad Terje
Myracle Jerry W.
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