Sensor device for determining the layer thickness of a thin...

Details Sensor device for determining the layer thickness of a thin... Sensor device for determining the layer thickness of a thin...

2007-03-06

2007-03-06

Hollington, Jermele (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

10411596

ABSTRACT:
To provide a sensor device for determining the layer thickness of a thin layer of an electrically conducting or semiconducting material which can be used in a simple and low-cost way, it is proposed that the said sensor device comprises one or more inductive proximity sensors which can be positioned at a distance from the layer, an inductive proximity sensor having an oscillator with a frequency which is adapted with respect to the material and the thickness range of the layer to be measured.

REFERENCES:
patent: 5781008 (1998-07-01), Muller et al.
patent: 6822440 (2004-11-01), Machul
patent: 195 38 575 (1997-06-01), None
patent: 199 49 977 (2001-05-01), None
patent: 100 00 730 (2001-07-01), None
Brochure of Fischer, “Fischerscope MMS”,Universal-Messsystem fur Schichtdicken und Werkstoffeigenschaften,date unknown.

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