Sensor device and a method for manufacturing the same

Details Sensor device and a method for manufacturing the same Sensor device and a method for manufacturing the same

2006-08-31

2009-12-15

Fuqua, Shawntina (Department: 3742)

Electric heating

Heating devices

With heating unit structure

C219S635000, C219S697000, C219S645000, C219S618000, C219S619000

Reexamination Certificate

active

07633039

ABSTRACT:
Embodiments discussed herein relate to sensor devices and processes of producing them. Some embodiments include a sensor device with a substrate with a sensing element mounted above the substrate, with a heating element, mounted substantially coplanar to the sensing element; and with a heat spreading element, the heat spreading element thermally coupling the sensing element and the heating element.

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