Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1995-10-30
1997-05-20
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
3612833, G01P 15125, H01G 700
Patent
active
056314221
ABSTRACT:
A sensor includes a first silicon layer, and a sensor element including at least one electrode structured from the first silicon layer. The sensor also includes at least one connecting element also structured from the first silicon layer. The connecting element has a doping less than the doping of the electrode. The sensor comprises at least one conductor track on the first silicon layer routed over the connecting element and coupled to the sensor element for supplying an external signal.
REFERENCES:
patent: 5337606 (1994-08-01), Bennett et al.
patent: 5345824 (1994-09-01), Sherman et al.
patent: 5417111 (1995-05-01), Sherman et al.
patent: 5495761 (1996-03-01), Diem et al.
Elsner Bernhard
Lutz Markus
Offenberg Michael
Sulzberger Peter
Moller Richard A.
Robert & Bosch GmbH
Williams Hezron E.
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