Sensor chip with additional heating element, method for...

Details Sensor chip with additional heating element, method for... Sensor chip with additional heating element, method for...

2005-01-25

2005-01-25

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Volume or rate of flow

Thermal type

Reexamination Certificate

active

06845660

ABSTRACT:
A sensor chip exposed to a flowing medium is provided with an additional heater situated upstream and at a definite distance from the sensor area, resulting in the impurities in the flowing medium being deposited in the area of the additional heater, and in the impurities being unable to reach the sensor area.

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