Sensor chip and apparatus for tactile and/or flow sensing

Measuring and testing – Fluid pressure gauge – Mounting and connection

Reexamination Certificate

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Reexamination Certificate

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07357035

ABSTRACT:
A sensor chip, comprising a flexible, polymer-based substrate, and at least one microfabricated sensor disposed on the substrate and including a conductive element. The at least one sensor comprises at least one of a tactile sensor and a flow sensor. Other embodiments of the present invention include sensors and/or multi-modal sensor nodes.

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