Sensor arrangement

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Coating selected area

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Details

205157, 205210, 205229, 205333, 205665, 205666, 205640, 205674, 205667, 422 8201, C25D 502

Patent

active

056859694

ABSTRACT:
A sensor arrangement having a substrate of doped silicon with channels in a principal face, a selective means for detecting a material, the selective means covering the principal face without filling the channels, and a measuring instrument for registering a physical quantity dependent on the influence of a material is provided. A catalytic layer is particularly used as selective means and a temperature sensor is particularly used as measuring instrument. Alternatively, the sensor arrangement is fashioned as a capacitor having a porous cooperating electrode. The channels are preferably produced by electrochemical etching.

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