Sensor and method utilizing multiple optical interferometers

Optics: measuring and testing – By light interference

Reexamination Certificate

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Reexamination Certificate

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07990539

ABSTRACT:
Disclosed is a low-cost high-resolution compact accelerometer which utilizes multiple self-mixing optical interferometers. The device is also a micro-opto-electro-mechanical systems (MOEMS) sensor. The interferometers are used to detect acceleration as well as monitor the wavelength, temperature, and refractive index and perform differential measurements. In addition, photodetectors are employed to monitor the input optical power.

REFERENCES:
patent: 5420688 (1995-05-01), Farah
patent: 5891747 (1999-04-01), Farah
patent: 2006/0192974 (2006-08-01), Li
patent: 2007/0103697 (2007-05-01), Degertekin
patent: 2008/0024763 (2008-01-01), Li

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