Sensor and method of use

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

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3612833, G01P 15125

Patent

active

061054283

ABSTRACT:
A sensor has an electrode (120) that is movable along three mutually perpendicular axes (10, 11, 12). The sensor also has stationary over-travel limiting structures that restrict the movement of the electrode (120) along the three axes (10, 11, 12).

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S.C. Chang et al., "Resonant-bridge Two-axis Microaccelerometer" Sensors and Actuators, A21-A23 (1190), pp. 342-345.

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