Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Patent
1996-03-25
1998-08-25
Meier, Stephen
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
H01L 2714, H01L 2982, H01L 2984
Patent
active
057985561
ABSTRACT:
A sensor (10) includes a cavity (31) formed by a substrate (11), an adhesive (21), and a filter (22). A sensing element (14) is located inside the cavity (31) while electrical contacts (17, 18) coupled to the sensing element (14) are located outside the cavity (31). The filter (22) protects the sensing element (14) from physical damage and contamination during die singulation and other assembly processes. The filter (22) also improves the chemical sensitivity, selectivity, response times, and refresh times of the sensing element (14).
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Patent Abstracts of Japan, vol. 010, No. 389 (P-531), 26 Dec. 1986 & JP 61 178653 A (Matsuhits Electric Works LTD), 11 Aug. 1986.
Hughes Henry G.
Kniffin Margret L.
Lue Ping-chang
Stuckey Marilyn J.
Chen George C.
Meier Stephen
Motorola Inc.
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