Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Reexamination Certificate
2005-12-30
2008-12-02
Lee, John R (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
C250S487100, C355S053000
Reexamination Certificate
active
07459669
ABSTRACT:
A sensor for use in a lithographic apparatus, the sensor having a liquid to prevent optical losses, especially when receiving radiation with a high NA. The liquid is fixed between two surfaces by capillary forces in an area through which radiation passes.
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Bastiaensen Rob Adrianus Antonius Maria
Hemerik Marcel Maurice
Mertens Jeroen Johannes Sophia Maria
Sonneveld Jacob
Van De Kerkhof Marcus Adrianus
ASML Netherlands B.V.
Lee John R
Pillsbury Winthrop Shaw & Pittman LLP
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