Sensor

Electrical resistors – Strain gauge type – Fluid- or gas pressure-actuated

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Details

338 42, 73721, 7386265, G01L 1022

Patent

active

046493638

ABSTRACT:
A sensor having a silicon die having a central region and a flexible annular sensing portion surrounding the central region. The sensor has apparatus carried by the central region of the die for limiting the movement of the central region in each of two opposite directions.

REFERENCES:
patent: 4040297 (1971-08-01), Karsmakers
patent: 4135408 (1979-01-01), Di Giouanni
patent: 4295115 (1981-10-01), Takahashi et al.
patent: 4364276 (1982-12-01), Shimazoe et al.
patent: 4454771 (1984-06-01), Shimazoe et al.

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