Electrical resistors – Strain gauge type – Fluid- or gas pressure-actuated
Patent
1985-07-22
1987-03-10
Goldberg, E. A.
Electrical resistors
Strain gauge type
Fluid- or gas pressure-actuated
338 42, 73721, 7386265, G01L 1022
Patent
active
046493638
ABSTRACT:
A sensor having a silicon die having a central region and a flexible annular sensing portion surrounding the central region. The sensor has apparatus carried by the central region of the die for limiting the movement of the central region in each of two opposite directions.
REFERENCES:
patent: 4040297 (1971-08-01), Karsmakers
patent: 4135408 (1979-01-01), Di Giouanni
patent: 4295115 (1981-10-01), Takahashi et al.
patent: 4364276 (1982-12-01), Shimazoe et al.
patent: 4454771 (1984-06-01), Shimazoe et al.
Goldberg E. A.
Honeywell Inc.
Lateef M. M.
Udseth William T.
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