Sensor

Details Sensor Sensor

2011-08-30

2011-08-30

Caputo, Lisa M (Department: 2855)

Thermal measuring and testing

Temperature measurement

By electrical or magnetic heat sensor

C374S183000, C374S185000

Reexamination Certificate

active

08007169

ABSTRACT:
A sensor, in particular a thermal sensor and/or gas sensor, encompassing an electrical sensor component having an electrical property whose value changes in temperature-dependent fashion, wherein the temperature-dependent electrical property is a resistance or an impedance. Thermal and electrical decoupling of the active structure from the substrate is accomplished by way of porous silicon and/or a cavity manufactured by electropolishing.

REFERENCES:
patent: 5600174 (1997-02-01), Reay et al.
patent: 2004/0169579 (2004-09-01), Mattes et al.
patent: 19845112 (2000-04-01), None
patent: 10219247 (2003-12-01), None
patent: 102004024285 (2005-12-01), None
Translation of DE 10219247.
International Search Report, PCT International Patent Application No. PCT/EP2006/063152, dated Oct. 2, 2006.
Nassiopoulou AG et al.: “Porous Silicon as an Effective Material for Thermal Isolation on Bulk Crystalline Silicon” Physica status solidi (A). Applied Research, Berlin, DE, vol. 182, No. 1, Mar. 12, 2000, pp. 307-311, XP008001587.

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