Sensitivity calibration disk for surface defect tester

Details Sensitivity calibration disk for surface defect tester Sensitivity calibration disk for surface defect tester

1998-03-27

1999-02-23

Font, Frank G.

Optics: measuring and testing

Standard

Surface standard

3562436, 3562438, 356423, G01J 102

Patent

active

058750274

ABSTRACT:
A calibration disk for calibrating a sensitivity of a surface defect tester, according to the present invention, comprises n (n is an integer equal to or larger than 2) false defect rows each including 3 or more false defects each formed in a radial or peripheral direction provided in the peripheral direction of the calibration disk at a predetermined angle pitch. The false defects of each false defect row take in the form of protrusions or recesses having substantially the same size, adjacent ones of the false defects are physically separated by a predetermined distance larger than a width of a laser spot and the false defects of a certain one of the false defect rows are different in size from the false defects of other false defect rows.

REFERENCES:
patent: 4346996 (1982-08-01), Miller
patent: 5258974 (1993-11-01), Ishimura et al.
patent: 5691812 (1997-11-01), Bates et al.

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