Sensing unit and method of making same

Details Sensing unit and method of making same Sensing unit and method of making same

2007-06-20

2009-12-08

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514330, C073S514310

Reexamination Certificate

active

07628071

ABSTRACT:
In a sensing unit according to the present invention, a movable portion of a spring portion is supported floatably above a recessed portion formed in a substrate. Thus, the movable portion is capable of oscillating in any direction parallel to the substrate surface. Moreover, the movable portion is capable of oscillating in the thickness direction of the substrate such that the amplitude of a center side end portion thereof reaches a maximum. A sensor portion is provided on the movable portion. As a result, the sensing unit according to the present invention has a higher degree of freedom in terms of the measurement direction than a conventional sensing unit that oscillates in only one direction.

REFERENCES:
patent: 5739431 (1998-04-01), Petri
patent: 5763783 (1998-06-01), Asada
patent: 7132722 (2006-11-01), Ohashi
patent: 7443158 (2008-10-01), Oohashi et al.
patent: 2008/0313882 (2008-12-01), Sasaki et al.

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