Sensing structure comprising a movable mass and a self-test stru

Details Sensing structure comprising a movable mass and a self-test stru Sensing structure comprising a movable mass and a self-test stru

1997-09-05

2000-06-06

Kwok, Helen C.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73 138, 73862626, G01P 15125

Patent

active

060704640

ABSTRACT:
A sensing structure (10) formed overlying a substrate (50), for example a semiconductor substrate, has a movable mass (12) substantially split into two halves with a self-test structure disposed between the two halves. The self-test structure has a plurality of single-capacitor actuators for displacing the movable mass. Each actuator is formed by a movable finger (18) connected to the movable mass and a fixed finger (44) mounted by an anchor to the substrate. Each actuator is shielded by a fixed shield finger (42) so that all actuators force the movable mass in a common direction.

REFERENCES:
patent: 5146389 (1992-09-01), Ristic et al.
patent: 5511420 (1996-04-01), Zhao et al.
patent: 5565625 (1996-10-01), Howe et al.
patent: 5569852 (1996-10-01), Marek et al.
patent: 5574222 (1996-11-01), Offenberg
patent: 5618989 (1997-04-01), Marek
patent: 5880369 (1999-03-01), Samuels et al.

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