Sensing of mirror position in an optical switch

Details Sensing of mirror position in an optical switch Sensing of mirror position in an optical switch

2005-05-03

2005-05-03

Lieu, Julie B. (Department: 2636)

Communications: electrical

Condition responsive indicating system

Specific condition

C359S221200

Reexamination Certificate

active

06888470

ABSTRACT:
A MEMS device employed in an optical switch has a position sensor configured to determine mirror orientation in the device. The position sensor includes at least one light sensor located under an etch gap defining the mirror in the switch. Change of light intensity at each light sensor due to the change in separation corresponding to the etch gap during mirror motion is measured and related to the mirror deflection angle. Information about the angle may be used to provide feedback to the motion actuator, which then may be operated to orient the mirror more accurately.

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