Sensing film material

Details Sensing film material Sensing film material

2007-10-16

2007-10-16

Williams, Hezron (Department: 2856)

Measuring and testing

Frictional resistance, coefficient or characteristics

Lubricant testing

Reexamination Certificate

active

11153424

ABSTRACT:
A sensor30has first and second electrodes32A,32B spaced to define a gap34therebetween. The electrodes are formed on a substrate which can be covered with a film of material. The width of the gap34is different at different positions on the electrodes32. This results in a sensing characteristic which can be made substantially linear, without sensitivity varying with film thickness, which arises from the use of a constant gap width. The sensor can be used to detect or measure film or liquid layer thickness, or solid material deposition.

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