Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reissue Patent
2011-06-21
2011-06-21
Patel, Ramesh B (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S108000, C700S031000, C700S103000, C257SE21525
Reissue Patent
active
RE042481
ABSTRACT:
A system and method for yield management is disclosed wherein a data set containing one or more prediction variable values and one or more response values is input into the system. The system can pre-process the input data set to remove prediction variables with missing values and data sets with missing values. The pre-processed data can then be used to generate a model that may be a decision tree. The system can accept user input to modify the generated model. Once the model is complete, one or more statistical analysis tools can be used to analyze the data and generate a list of the key yield factors for the particular data set.
REFERENCES:
patent: 4754410 (1988-06-01), Leech et al.
patent: 5727128 (1998-03-01), Morrison
patent: 5897627 (1999-04-01), Leivian et al.
patent: 6098063 (2000-08-01), Xie et al.
patent: 6336086 (2002-01-01), Perez et al.
Ison et al., Semiconductor Manufacturing Conference Proceedings, 1997 IEEE Symposium on “Fault diagnosis of plasma etch equipment”, San Francisco, Ca. published Oct. 6-8, 1997, pp. B49-B52.
Irani et al. Expert, IEEE vol. 8, Issue 1, “Applying machine learning to semiconductor manufacturing”, Feb. 1993, pp. 41-47.
Famili et al., “Data Preprocessing and Intelligent Data Analysis,”Intelligent Data Analysis Journal, pp. 1-28 (Mar. 24, 1997).
Lee et al., “Yield Analysis and Data Management Using Yield Manager™,”IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp. 19-30 (1998).
Turney, P., “Data Engineering for the Analysis of Semiconductor Manufacturing Data,”Workshop on Data Engineering for Inductive Learning, pp. 1-10 (Apr. 3, 1995).
“Quadrillion: Q-Yield Product Overview,” Quadrillion Corporation (last accessed at http://web.archive.org/web/19971210064219/www.quadrillion.com/qyov... Feb. 5, 2009) 2 pages.
“Quadrillion: Training Services,” Quadrillion Corporation (last accessed at http://web.archive.org/web/19971210064511/www.quadrillion.com/train.html Feb. 5, 2009) 2 pages.
Email from Dave Garrod at PDF Solutions, Inc. enclosing prior art for the yield analysis and data mining tool called Q-Yield, 1 page (Sent Feb. 5, 2009).
Friedhoff, et al., “Analysis of Intra-Level Isolation Test Structure, etc.” Proc. IEEE 1989 Int. Conf. Micro. Test Struc., Mar, 1989, pp. 217-221,vol. 2, No. 1, Pittsburgh, PA.
Yang, Y-K., “EPAS: An Emitter Piloting Advisory Expert System, etc.” IEEE Trans. Semicon. Mfg., May 1990, pp. 45-53, vol. 3, No. 2, US.
Lee, et al., “RTSPC: A Sofware Utility for Real-Time SPC, etc.” IEEE Trans. Semicon. Mfg., Feb, 1995, pp. 17-25, vol. 8, No. 1, US.
Bergendahl, et al., “Optimization of Plasma Processing, etc.” IBM. J. Res. Develop., Sep. 1982, pp. 580-589, vol. 26, No. 5, IBM, US.
Murthy, S., Automatic Construction of Decision Trees from Data: A Multi-Disciplinary Survey, Data Mining and Knowledge Dscovery, 1998, pp. 345-389, v. 2, Kluwer Aca. Pub., US.
Data Mining and the Case for Sampling: Solving Business Problems Using SAS Enterprise Miner Software, 1998, pp. 1-35, Sas Institute Inc., US.
Quinlan, J., Unknown Attribute Values in Induction in Segre, A. (Ed.), Proc. Sixth Intl. Machine Learning Workshop, 1989, Morgan Kaufmann, US.
Lee, F., et al., Yield Analysis and Data Management Using Yield Manager, 1998 IEEE/Semi Adv. Semi. Manuf. Conf., 1998, pp. 19-30, US.
Perez, R., et al., Machine Learning for a Dynamic Manufacturing Environment, ACM SIGICE Bulletin, 1994, pp. 5-9, v. 19, US.
Buckheit Jonathan B.
Budd David W.
Wang Weidong
Garland Steven R
Harrington & Smith
Patel Ramesh B
Rudolph Technologies, Inc.
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