Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1997-07-14
1999-04-20
Oda, Christine K.
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
73 137, G01P 904
Patent
active
058958517
ABSTRACT:
A yaw rate sensor, which can be structured easily and at low cost and which can also detect exerted acceleration with high accuracy, is obtained. A movable electrode section is provided spaced at a specified gap with respect to a semiconductor substrate; fixed electrodes for excitation use forcibly vibrate the movable electrode section using an electrostatic force; a vertical displacement detection portion detects a vertical displacement of the movable electrode section; a horizontal displacement detection portion detects a horizontal displacement of the movable electrode section; and using at least the detection output of the vertical displacement detection portion, a signal processing circuit obtains a yaw rate detection output. Then, an aging compensation circuit detects an amplitude condition of the movable electrode section using the output of the horizontal displacement detection means; and the forced vibration of the movable electrode section is maintained a vibration at a resonance frequency.
REFERENCES:
patent: 5500549 (1996-03-01), Takeuchi et al.
Hattori Tadashi
Kano Kazuhiko
Otsuka Yoshinori
Nippondenso Co. Ltd.
Oda Christine K.
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