Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate
2005-09-06
2005-09-06
Wille, Douglas A. (Department: 2814)
Heating
Accessory means for holding, shielding or supporting work...
Support structure for heat treating ceramics
C206S711000, C211S041180
Reexamination Certificate
active
06939132
ABSTRACT:
Various embodiments of an apparatus for holding and processing semiconductor workpieces are provided. In one aspect, an apparatus is provided that includes a first base, a second base and three elongated members coupled to and between the first base and the second base. The three elongated members are spatially arranged so that a semiconductor workpiece may be positioned therebetween. Each of the elongated members has a first lateral edge, a second lateral edge and at least one radially inwardly projecting member. The at least one radially inwardly projecting member has a third lateral edge, a fourth lateral edge and an upper surface for receiving a portion of the semiconductor workpiece and a lower surface. The third lateral edge is displaced laterally inward from the first lateral edge and the fourth lateral edge is displaced laterally inward from the second lateral edge.
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Samsung Austin Semiconductor, L.P.
Wille Douglas A.
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