Semiconductor waxer detection system

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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Details

250223R, 414274, H01J 4014

Patent

active

050031880

ABSTRACT:
A wafer basket station includes a semiconductor wafer basket containing therein a number of semiconductor wafers and an elevating device which raises and lowers the wafer basket to bring a desired wafer in its taken out height. A wafer detecting device is formed with a transmission type optical sensor disposed inclined so that the optical axis thereof passes a center of a semiconductor wafer at the desired height, but not to pass adjacent wafers of the semiconductor wafer.
The elevating device of the wafer basket has an elevator which supports wafers to be worked and treated and is guided and driven vertically with respect to a base frame of the device. The elevator is provided with an opaque body. A photocoupler support plate is guided to move vertically and supported with respect to the base frame of the device. A spring means is energized in the departing direction away from the photocoupler support plate against the base frame. A screw adjusting means is rotatably supported while being restricted to move downwardly with respect to the base frame and connected with the support plate, so that by its rotation the relative position of the photocoupler and the base frame is adjusted.

REFERENCES:
patent: 3824020 (1974-07-01), Pease
patent: 4238780 (1980-12-01), Doemens
patent: 4259019 (1981-03-01), Johannsmeier et al.
patent: 4625666 (1986-12-01), Sick
patent: 4786816 (1988-11-01), Ohmori et al.
patent: 4803373 (1989-02-01), Imamura et al.
patent: 4806773 (1989-02-01), Hiraga et al.

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