Semiconductor wafer transporter

Details Semiconductor wafer transporter Semiconductor wafer transporter

1997-07-14

1999-03-30

Underwood, Donald W.

Material or article handling

Apparatus for charging a load holding or supporting element...

With simultaneous charging and discharging of plural load...

414416, 414937, B65H 300

Patent

active

058880429

ABSTRACT:
A semiconductor wafer transporter includes a transport mechanism for taking out a wafer from a carrier storing a large number of semiconductor wafers and transporting the wafer to a processor for performing visual inspection, patterning, etc. The carrier is placed in a predetermined orientation and then a wafer outlet of the carrier is rotated so as to face the transport mechanism. The carrier can be installed and removed safely and easily without complicating a transport mechanism.

REFERENCES:
patent: 4501527 (1985-02-01), Jacoby et al.
patent: 4770590 (1988-09-01), Hugues et al.
patent: 5664926 (1997-09-01), Sussman et al.

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