Semiconductor wafer transport system

Details Semiconductor wafer transport system Semiconductor wafer transport system

1982-09-17

1985-09-10

Reese, Randolph A.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

104138R, 104165, 118500, 198619, 414340, B65G 3500

Patent

active

045403260

ABSTRACT:
A system is described for the automated transfer of wafer carriers containing semi-conductor wafers, to various work stations and processing units along a process line. The system includes tunnel and track segments which are joined to provide a path of desired length. A semi-conductor carrier rides on a cart, which is in one tunnel and is magnetically coupled to a motorized cart which is in a separate tunnel to keep contaminants away from the wafer carrier. The tunnel enclosing the wafer carrier is also purged with nitrogen or filtered air to keep contaminants away from the carrier.

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