Semiconductor wafer transferring method and apparatus and boat f

Details Semiconductor wafer transferring method and apparatus and boat f Semiconductor wafer transferring method and apparatus and boat f

1988-11-03

1991-07-09

Werner, Frank E.

Material or article handling

Apparatus for moving intersupporting articles into, within,...

Stack forming apparatus

414416, 414225, 414273, 414750, 901 47, 118500, B65G 104

Patent

active

050300571

ABSTRACT:
A wafer transferring method for transferring wafers between a cassette and a boat having grooves to hold the wafers, comprises the steps of providing an identification mechanism for positional alignment on the boat in advance, detecting the identification mechanism, and aligning the boat to a predetermined position based on a detection result and transferring the wafers from the cassette to the boat. A wafer transferring apparatus comprises a loading device for extracting wafers from a cassette and transferring the wafers onto a boat, a detection device for detecting an identification section provided on the boat in order to identify a wafer transferring position on the boat, and a control device for acquiring the wafer transferring position on the boat based on a detection result attained from the detection device and controlling a mutual position between the boat and the cassette to come to a predetermined position.

REFERENCES:
patent: 3998333 (1976-12-01), Kamada
patent: 4449885 (1984-05-01), Hertel et al.
patent: 4466766 (1984-08-01), Geren et al.
patent: 4568234 (1986-02-01), Lee et al.
patent: 4687091 (1987-08-01), Sticht
patent: 4757890 (1988-07-01), Motoda
patent: 4782760 (1988-11-01), Rohrbach et al.

Affiliated with

Also associated with

Rating

Semiconductor wafer transferring method and apparatus and boat f does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor wafer transferring method and apparatus and boat f, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor wafer transferring method and apparatus and boat f will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-614318