Semiconductor wafer transfer device

Details Semiconductor wafer transfer device Semiconductor wafer transfer device

1974-07-22

1976-04-13

Spar, Robert J.

Supports: racks

Special article

Receptacle support

53246, 211 41, 211126, 221 91, B65G 6504

Patent

active

039498913

ABSTRACT:
A device for permitting the simultaneous transfer of a plurality of silicon wafers from one wafer carrier to another, and particularly for permitting a mass transfer between carriers having different wafer spacings. The device comprises two rectangular frames with a portion of the upper frame extending into the lower frame. Both frames are provided with a plurality of wafer slots although in the lower frame there is a greater number of slots and they are more closely spaced than in the upper frame. Each frame is adapted to interface with and be releasably secured to a carrier having a like number of wafer slots. The upper frame is slidable within the lower frame and means are provided to register its slots with different groups of the slots in the lower frame. With such an arrangement, wafers from a carrier secured to the upper frame can be transferred to a particular group of slots in a carrier secured to the lower frame after which the upper frame can be moved so that its slots register with a different group of slots in the lower frame whereby another carrier can be secured to the upper frame and its wafers transferred to a different group of slots in the carrier secured to the lower frame.

REFERENCES:
patent: 1286810 (1918-12-01), Sheppard
patent: 2619869 (1952-12-01), Stewart
patent: 2645398 (1953-07-01), Anderson
patent: 3263841 (1966-08-01), Wanesky

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