Semiconductor wafer transfer apparatus with back-to-back positio

Details Semiconductor wafer transfer apparatus with back-to-back positio Semiconductor wafer transfer apparatus with back-to-back positio

1988-01-11

1989-08-15

Bucci, David A.

Material or article handling

Device for emptying portable receptacle

For emptying contents thereof into portable receiving means

414417, B65G 6500

Patent

active

048569577

ABSTRACT:
An apparatus is disclosed for the bulk transfer of semiconductor wafers from container to container for processing in the back-to-back configuration. The apparatus includes a stage (12) for selectively raising the wafers from a boat (14) upward into a retaining mechanism (18). The wafers are confined in a back-to-back configuration through a slot (64) in the end of a back-to-back retainer (34). The back-to-back configured wafers are then removed, processed and then disposed back in the retaining mechanism (18). The back-to-back wafers are aligned with an alignment slot (76) in a preseparation retainer (36). The preseparation retainer (36) provides both alignment and a slight preseparation with respect to a separation retainer (38). The separation retainer (38) has a separation edge (118) which separates the back-to-back configured wafers into slots (104) and (108). The wafers are then removed after separation thereof.

REFERENCES:
patent: 3949891 (1976-04-01), Butler et al.
patent: 4431361 (1984-02-01), Bayne
patent: 4566839 (1986-01-01), Butler
patent: 4566841 (1986-01-01), Ohmura et al.
patent: 4568234 (1986-02-01), Lee et al.
patent: 4573851 (1986-03-01), Butler
patent: 4611966 (1986-09-01), Johnson
patent: 4695217 (1987-09-01), Lau
patent: 4744715 (1988-05-01), Kawabata

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