Semiconductor wafer transfer apparatus and method

Material or article handling – Device for emptying portable receptacle – For emptying contents thereof into portable receiving means

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414417, 414786, 211 41, B65G 6504

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active

045738513

ABSTRACT:
An apparatus for transferring wafers between carriers with different wafer spacings and different wafer capacities includes an elevator with two sets of wafer supporting grooves that extend through a carrier to lift wafers from it to a temporary holding region whereat the first and second groups of wafers can be selectively retained by means of first and second movable retainers and first and second retainer blocks. Each wafer supporting groove includes a steeply inclined surface that contacts one point of an edge of a wafer, urging a peripheral portion of the opposite face against a flat opposite vertical wall of the groove. The steeply inclined surface of another wafer supporting groove contacting the same wafer urges a peripheral portion of the opposite wafer face against a flat vertical wall of the second groove. The first and second retainers each contain V-grooves that are aligned with V-grooves of a corresponding one of the retainer blocks to support alternate wafers in the holding region. The retainers and retainer blocks are laterally shiftable to align the V-grooves of either the first retainer or the second retainer with the odd numbered wafer support grooves.

REFERENCES:
patent: 3534862 (1970-10-01), Shambelan
patent: 3606034 (1971-09-01), Lewis
patent: 3949891 (1976-04-01), Butler et al.
patent: 4001585 (1977-01-01), Coutarel
patent: 4040533 (1977-08-01), De Boer et al.
patent: 4311427 (1982-01-01), Coad et al.

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