Semiconductor wafer support carrier

Details Semiconductor wafer support carrier Semiconductor wafer support carrier

1990-10-09

1992-07-21

Gibson, Jr., Robert W.

Supports: racks

Special article

Platelike

118500, A47F 700

Patent

active

051315467

ABSTRACT:
A semiconductor wafer support carrier used for supporting semiconductor wafers during a liquid phase process. The semiconductor wafer support carrier supports the semiconductor wafers when the semiconductor wafers are standing and spaced. The semiconductor wafer support carrier comprises a support frame supporting the semiconductor wafers, and dust protector plates arranged parallel to the semiconductor wafers. The dust protection plates are high enough that the upper ends thereof come out of the process liquid prior to the semiconductor wafers when the support frame is lifted out of the liquid.

REFERENCES:
patent: 3534862 (1970-10-01), Schambelan
patent: 3926305 (1975-12-01), Wallestad
patent: 4088254 (1978-05-01), Hooper
patent: 4653650 (1987-03-01), Schulke
patent: 4669612 (1987-06-01), Mortensen
patent: 4841906 (1989-06-01), deGeest
patent: 4949848 (1990-08-01), Kos
patent: 5011041 (1991-04-01), Kakizaki
patent: 5012935 (1991-05-01), Aigo

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