Semiconductor wafer support

Equipment for production – distribution – or transformation of ene – Distribution – modification or control – Semiconductor – transistor or integrated circuit

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Patent

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D03509427

REFERENCES:
patent: D235553 (1975-06-01), Kunkle
patent: D273192 (1984-03-01), Yoshida
patent: D329192 (1992-09-01), Susac
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patent: 5042421 (1991-08-01), Anbe
patent: 5042423 (1991-08-01), Wilkinson
patent: 5109980 (1992-05-01), Matsuoka et al.
patent: 5115912 (1992-05-01), Murphy
patent: 5156983 (1992-10-01), Schlesinger et al.

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