Semiconductor wafer storage case and semiconductor wafer...

Details Semiconductor wafer storage case and semiconductor wafer... Semiconductor wafer storage case and semiconductor wafer...

2008-06-02

2010-12-28

Yu, Mickey (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S832000, C206S454000, C206S445000, C206S710000, C229S067300, C211S041180

Reexamination Certificate

active

07857140

ABSTRACT:
A semiconductor wafer storage case is disclosed that includes plural support members that are spaced at predetermined intervals with respect to each other and are each configured to come into contact with a peripheral edge region of a first face of a semiconductor wafer, and an elastic member that elastically supports the support members with respect to each other and is configured to elastically deform to come into contact with a second face of the semiconductor wafer and press the semiconductor wafer onto a corresponding support member.

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International Search Report of PCT/JP2005/022360, date of mailing Mar. 14, 2006.

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