Semiconductor wafer storage apparatus and semiconductor device f

Details Semiconductor wafer storage apparatus and semiconductor device f Semiconductor wafer storage apparatus and semiconductor device f

1996-04-18

1999-12-07

Joyce, Harold

Ventilation

Clean room

414935, F24F 316

Patent

active

059973986

ABSTRACT:
A semiconductor wafer storage apparatus includes a wafer storage unit main body and a gas supply unit with a chemical filter, the gas supply unit being arranged independently of the wafer storage unit.

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patent: 5303482 (1994-04-01), Yamashita et al.
patent: 5431600 (1995-07-01), Murata et al.
patent: 5434644 (1995-07-01), Kitano et al.
patent: 5447294 (1995-09-01), Sakata et al.
patent: 5527390 (1996-06-01), Ono et al.
patent: 5626820 (1997-05-01), Kinkead et al.

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