Semiconductor wafer sawing system and method

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Making plural separate devices

Reexamination Certificate

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C438S033000, C438S068000, C438S462000

Reexamination Certificate

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07943425

ABSTRACT:
Semiconductor wafer sawing systems and methods are described in which a wafer may be secured in a sawing position having a surface exposed to incur sawing with at least a portion of the exposed wafer surface positioned below the center of gravity of the wafer such that prevailing force of gravity may be used to assist in the removal of contaminants from the wafer.

REFERENCES:
patent: 6776078 (2004-08-01), Gawazawa

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