Material or article handling – Device for emptying portable receptacle – Nongravity type
Reexamination Certificate
2005-01-25
2005-01-25
Lillis, Eileen D. (Department: 3652)
Material or article handling
Device for emptying portable receptacle
Nongravity type
C414S217000, C414S941000
Reexamination Certificate
active
06846149
ABSTRACT:
A semiconductor wafer processing system including a multi-chamber module having vertically-stacked semiconductor wafer process chambers and a loadlock chamber dedicated to each semiconductor wafer process chamber. Each process chamber includes a chuck for holding a wafer during wafer processing. The multi-chamber modules may be oriented in a linear array. The system further includes an apparatus having a dual-wafer single-axis transfer arm including a monolithic arm pivotally mounted within said loadlock chamber about a single pivot axis. The apparatus is adapted to carry two wafers, one unprocessed and one processed, simultaneously between the loadlock chamber and the process chamber. A method utilizing the disclosed system is also provided.
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Carvalheira Helder R.
Cossentine Dan L.
Mayer Bruce E.
Menagh Frank S.
Savage Richard N.
Aviza Technology Inc.
Dorsey & Whitney LLP
Fox Charles A.
Lillis Eileen D.
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