Material or article handling – Apparatus for moving intersupporting articles into – within,... – Stack forming apparatus
Patent
1996-03-29
1998-08-04
Keenan, James W.
Material or article handling
Apparatus for moving intersupporting articles into, within,...
Stack forming apparatus
414417, 414938, B65G 4907
Patent
active
057884544
ABSTRACT:
A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.
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Berner Robert W.
Culliton Stephen P.
Curtis Gary L.
Thompson Raymon F.
Wright Blaine G.
Keenan James W.
Semitool Inc.
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